摘要
开展了波长分别为1064 nm、532 nm和416 nm,脉宽均为5 ns的单脉冲激光损伤CCD的实验,观测并比较了不同损伤阶段三种波长激光各自损伤CCD的视频图像、微观形貌、阈值和芯片引脚的电阻阻值,分析了CCD的损伤机理。在532 nm和416 nm激光所损伤CCD视频输出图像中发现了并未出现在1064 nm激光所损伤CCD视频输出图像中的黑点现象;CCD发生损伤时,微透镜层的损伤状况随辐照激光波长减小而愈加严重;1064 nm激光损伤CCD的阈值最高,532 nm和416 nm激光损伤CCD的阈值相近。与未损伤的CCD相比,完全失效CCD的基底与垂直移位寄存器的电阻、垂直移位寄存器间的电阻明显下降,由此推断,基底与多晶硅电极的短路或多晶硅电极间的短路是造成CCD白屏的主要原因。
In this paper,the experiments of single-pulse laser damage charge coupled device(CCD)with wavelengths of 1064 nm,532 nm and 416 nm and pulse width of 5 ns were carried out,respectively.The video images,microstructural morphology,damage threshold and resistance values between different pins of the chips of the CCDs,which damaged separately by three wavelengths of laser at different damage stages,were observed,measured and compared.And the damage mechanism of the CCD was analyzed.Black spots were found in the video output image of the CCD damaged by the 532 nm and 416 nm lasers.However,this phenomenon was not observed in the video output image of the CCD damaged by the 1064 nm laser.When damage occurs in the CCD,the damage of the microlens layer becomes more serious as the wavelength of the irradiated laser decreases.And the threshold of the CCD damaged by the 1064 nm laser is the highest,and the threshold of the CCD damaged by the 532 nm and 416 nm laser is similar;Compared with the undamaged CCD,the resistance between the substrate and the vertical shift registers and the resistance between the vertical shift registers of the completely invalid CCD significantly decrease.Therefore,it is concluded that the short circuit between the substrate and the polysilicon electrodes or the short circuit between the polysilicon electrodes is the main reason for the white screen of the CCD.
作者
张鑫
牛春晖
马牧燕
秦绪志
张亚男
Zhang Xin;Niu Chunhui;Ma Muyan;Qin Xuzhi;Zhang Yanan(School of Instrument Science and opto Electronics Engineering,Beijing Information Science&Technology University,Beijing 100192,China)
出处
《应用激光》
CSCD
北大核心
2020年第2期300-307,共8页
Applied Laser
关键词
单脉冲激光
损伤阈值
CCD
损伤机理
single-pulse laser
damage threshold
CCD
damage mechanism
