摘要
基于声表面波技术的紫外探测器具有响应速度快、灵敏度高、制作简单且可以无线无源监测等众多优势,成为近年来紫外探测领域的研究热点。本文根据紫外敏感薄膜分类综述了声表面波紫外探测的研究进展,剖析了声表面波紫外探测敏感机理,阐述了氮化镓、掺杂氮化镓、氧化锌、掺杂氧化锌、纳米结构氧化锌,氮化铝等敏感膜的材料特点、制备加工及其紫外探测器性能等。分析了近年来新型声表面波紫外传感器的研究状况,展望了声表面波紫外探测的未来发展趋势与挑战。
Ultraviolet(UV)detectors based on the Surface Acoustic Wave(SAW)technology have become an active field of research owing to their advantages such as fast response,high sensitivity,simple fabrication,and wireless passive monitoring.In this study,the progress in the research of SAW UV detection,based on the classification of UV-sensitive films,was reviewed.The sensitive mechanism of SAW UV detection was analyzed and the characteristics,preparations,and UV performances of gallium nitride,doped gallium nitride,zinc oxide,doped zinc oxide,nanostructured zinc oxide,aluminum nitride,and other sensitive membrane materials were presented.This work also demonstrated the latest advancements in SAW UV sensors and their prospects in future development trends and challenges.
作者
殷长帅
周剑
刘翊
吴建辉
熊硕
段辉高
YIN Chang-shuai;ZHOU Jian;LIU Yi;WU Jian-hui;XIONG Shuo;DUAN Hui-gao(State Key Laboratory of Automotive Body Design and Manufacturing, School of Mechanical and Transportation Engineering, Hunan University, Changsha 410082, China;National Innovation Center of Advanced Rail Transit Equipment, Zhuzhou 412000, China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2020年第7期1433-1445,共13页
Optics and Precision Engineering
基金
湖南省重点研发项目(No.2019GK2111,No.2018GK2044)。
关键词
声表面波
紫外探测
氮化镓
氧化锌
surface acoustic wave
ultraviolet detection
GaN
ZnO
