摘要
建立了一个适用于常压容性耦合氩等离子体诊断的简单碰撞辐射(collision radiation,CR)模型,将发射光谱(optical emission spectrum,OES)与CR模型结合,测量常压容性耦合氩等离子体的电子温度(Te)、电子密度(ne)等重要参数,并和由一维混合整体模型(hybrid global model)模拟得到的电子温度和电子密度进行比较。结果表明:由两种方法得出的Te和ne随射频源功率变化的趋势基本一致,表明CR模型是正确的,故OES结合CR模型的方法可用于常压容性耦合等离子体的诊断。
This paper established a simple collision radiation(CR)model for capacitive coupled argon(Ar)plasma diagnosis under atmospheric pressure.The optical emission spectrum(OES)and CR model was combined to measure the electron temperature(T e)and electron density(n e).The test results were compared with the ones obtained from one-dimensional hybrid global model.It is found that the variation trends of T e and n e with the radio-frequency(RF)source power obtained by the two methods are consistent.The results verifies the correctness of the CR model,and the method can be applied to the diagnosis of atmospheric pressure capacitive coupled plasma.
作者
王墅
黄晓江
丁可
苗晓莉
WANG Shu;HUANG Xiaojiang;DING Ke;MIAO Xiaoli(College of Science,Donghua University,Shanghai 201620,China)
出处
《东华大学学报（自然科学版）》
CAS
北大核心
2020年第3期492-496,共5页
Journal of Donghua University(Natural Science)
关键词
碰撞辐射模型
发射光谱
电子温度
电子密度
一维混合整体模型
collision radiation model
optical emission spectrum
electronic temperature
electron density
one-dimensional hybrid global model
