摘要
为了获得不同气氛对紫外激光加工非晶合金盲孔的质量和效率的影响,采用波长355nm的纳秒激光对Zr–Cu非晶合金进行同心圆式旋切法盲孔加工试验,利用光学显微镜、扫描电镜、激光共聚焦显微镜等仪器对盲孔的显微形貌、粗糙度和加工效率进行了测试。结果表明,气氛的压力和种类影响着盲孔的底面形貌、加工质量和效率。气氛压力越小,盲孔底面粗糙度越低,材料的去除效率越高;相对于氮气、空气中的加工,氧气中表面粗糙度最小,且材料去除率最高。另外,加工表面未出现晶化现象,说明在一定激光参数下紫外纳秒激光可以实现非晶态合金的无晶化加工。
In order to obtain the effect of different atmospheres on the quality and efficiency of ultraviolet laser processing of blind holes in amorphous alloys, a concentric circular rotary cutting method was used to process blind holes in Zr–Cu amorphous alloys with nanosecond laser(355 nm). The morphology, roughness and processing efficiency of blind holes were measured by optical microscopy, scanning electron microscopy and laser confocal microscopy. The results showed that the pressure and types of atmosphere affects the bottom morphology, processing quality and efficiency of blind hole. The smaller the pressure of atmosphere, the lower the surface roughness, and the higher the material removal efficiency. Compared with the processing in nitrogen and air, the surface roughness in oxygen is the smallest, and the material removal rate is the highest. In addition, there was no crystallization on the processed surface, which indicated that ultraviolet nanosecond laser can realize amorphous-processing of amorphous alloy.
作者
李元成
毛忠
王程浩
蔡敏
张伟
张晓兵
LI Yuancheng;MAO Zhong;WANG Chenghao;CAI Min;ZHANG Wei;ZHANG Xiaobing(National Key Laboratory of Science and Technology on Power Beam Processes,AVIC Manufacturing Technology Institute,Beijing 100024,China)
出处
《航空制造技术》
2020年第8期61-67,共7页
Aeronautical Manufacturing Technology
基金
广东省重点领域研发计划项目(2018B090906002)。
关键词
紫外激光
纳秒激光
盲孔
激光加工
Zr–Cu非晶合金
表面质量
Ultraviolet laser
Nanosecond laser
Blind hole
Laser processing
Zr–Cu amorphous alloy
Surface quality
