摘要
介绍了一种双波段红外探测器叠层结构微透镜阵列的设计,从实际光线角度进行建模,考虑微透镜加工线宽的要求,利用光学非成像理论的原理优化。并根据微透镜的衍射效率进行量化,分析了影响占空比因素的计算方法等,并对其进行了详细说明。该设计方法从实际入射光线建模,思路新颖,该方法经加工微透镜与探测器耦合后验证可行。给微透镜阵列的设计者一些启发,可用于其他多种叠层结构探测器的微透镜阵列设计。
The design of a double-band infrared detector stacked structure microlens array was introduced, which was modeled from the angle of actual light and optimized by using the principle of optical non-imaging theory, taking into account the requirement of microlens processing linewidth.According to the diffraction efficiency of the microlens, the calculation method of the factors affecting duty cycle was analyzed and explained in detail. The design method was novel and unique, which was based on the actual incident light. The method was verified to be feasible by coupling the processed microlens with the detector. Some inspiration is given to the designer of microlens arrays, which can be used in the design of microlens arrays for other multi-layer detectors.
作者
徐正奎
李晓斌
乐丽珠
于振龙
何俊
王春兴
Xu Zhengkui;Li Xiaobin;Le Lizhu;Yu Zhenlong;He Jun;Wang Chunxing(North Night Vision Technology Group,Kunming 650223,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2019年第8期103-107,共5页
Infrared and Laser Engineering
关键词
微透镜阵列
微透镜量化
占空比
microlens array
microlens quantification
vacancy ratio
