摘要
保证激光直写系统中曝光光功率的稳定和连续可调对所制作的二元器件的性能具有重要意 义。利用MABLAB工具对声光调制器的数学模型进行辨识,得到声光调制器的传递函数。并借助于MABLAB的SIMULINK工具箱,设计出控制系统的仿真模型,得到实用的控制系统。实验结果表明AR模型很好地反映了声光调制器的特性,所设计的控制系统响应速度快,控制精度高。
Stability and continuous adjustment of exposure light source power in laser direct writing system have important significance in manufacturing of binary devices. Transfer function of an acousto-optic modulator is obtained through Identification of the mathematical model of acousto-optic modulator by using MABLAB tool. By means of SIMULINK tool box for MABLAB, the simulation model for the control system is designed and a practical control system is obtained. The experimental results show that AR model reflects the properties of the acousto-optic modulator in a well mode. The designed control system has the advantages of fast response speed and high control accuracy.
出处
《光电工程》
CAS
CSCD
北大核心
2002年第5期12-14,共3页
Opto-Electronic Engineering
基金
国家自然科学基金资助项目(59472020)
浙江省自然科学基金资助项目(596048)
关键词
声光调制器
数学模型
激光控制系统
激光直写系统
二元光学
Acousto-Optical modulators
Mathematical models
Laser control systems
Laser direct writing systems
Binary optics
