摘要
A anified plasma sheath model and its potential equation are proposed. Any higher-ordor-approximation analytical solutions for the unified plasma sheath potential equa tiop are derived by double decomposition method.
A anified plasma sheath model and its potential equation are proposed. Any higher-ordor-approximation analytical solutions for the unified plasma sheath potential equa tiop are derived by double decomposition method.
关键词
等离子体
屏蔽模型
双分解方法
近似分析
Plasma sheath, Double decomposition method, Approximation analytical solution