摘要
各种蒸发光学薄膜都存在内应力,其性质和大小直接影响光学薄膜性能与质量。因此,薄膜内应力的精确检测具有重大的实用意义。本文介绍以高灵敏度的光纤传感器为变换器,以高分辨率的 CCD 为光信号检测器的内应力检测系统,具有灵活、结构小巧、精度高、实时测量等优点,实践证明是有效的。
All evaporated optical films exhibit internal stress whose property and strength have a direct effect on the performance and quality of the optical films. Therefere,accurate measurment of the internal stress in the film is of great si- gnificance in practical use.An internal stress measuring system which uses a high sensitive optical fiber sensor as a converter and a high resolution CCD as an op- tical signal detector is presented in the paper.This system is characterized by fle- xibility and effectiveness,small size,high precision and real time measuring, etc.
出处
《半导体光电》
CAS
CSCD
北大核心
1992年第4期402-405,共4页
Semiconductor Optoelectronics
