摘要
A method of 2-D Fourier transform used in 3-D surface profilometry is proposed,analyzed and compared with 1-D Fourier transform method in theory and practical measuring result.It was proved that the 2-D Fourier transform method has more advantages over 1-D Fourier transform method in biggest crook-rate limits,accuracy and sensitivity of measuring.Study on measuring object surface details with large crook-rate changing accurately used new higher-power index low-pass filter of spatial frequency domain.A new method of automatic produced reference grating image and error-correcting is proposed.One undeform row of deform grating image is used to extend a complete reference grating image,and some error-correcting method is used to process the result to get accurate surface shape and the deflection of reference surface normal line deviated from the axle of camera.By this new method,one deform rectangle grating image is only used to get the 3-D shape accurately.
A method of 2-D Fourier transform used in 3-D surface profilometry is proposed,analyzed and compared with 1-D Fourier transform method in theory and practical measuring result.It was proved that the 2-D Fourier transform method has more advantages over 1-D Fourier transform method in biggest crook-rate limits,accuracy and sensitivity of measuring.Study on measuring object surface details with large crook-rate changing accurately used new higher-power index low-pass filter of spatial frequency domain.A new method of automatic produced reference grating image and error-correcting is proposed.One undeform row of deform grating image is used to extend a complete reference grating image,and some error-correcting method is used to process the result to get accurate surface shape and the deflection of reference surface normal line deviated from the axle of camera.By this new method,one deform rectangle grating image is only used to get the 3-D shape accurately.
