摘要
以原子比Al:Sb:Te=0.7:2:3的混和粉为原料,采用真空合成法与烧结-热等静压制备Al0.7Sb2Te3三元靶材,通过XRD、FESEM、EDS、XPS等手段表征其性能,且重点采用XPS研究Al在Al0.7Sb2Te3三元靶材的存在状态。结果表明:Al掺杂后,靶材主相Sb2Te3的晶格常数变化,且单质Al弥散相与Al0.1Sb2Te3基体相共存,表明掺杂对靶材的组织结构确有影响;刻蚀深度从0 nm增加至405.9 nm,Al价态从以Al2O3的化合态为主逐渐过渡至以单质态为主,且Al以Al2O3形态为主的区域深度约90 nm;刻蚀深度为405.9 nm的XPS分析表明,Al0.1Sb2Te3中的Al通过有效化合形成AlSb影响着靶材的组织结构。
Al0.7Sb2Te3 ternary target was prepared by vacuum synthesis and sintering-HIP using mixed powder of Al,Sb and Se in an atomic ratio of 0.7:2:3 as raw material.Target properties were characterized by XRD,FESEM,EDS and XPS,and the state of Al in the ternary target was researched primarily by XPS.The results show that with aluminum doping,the lattice constant of main phase Sb2Te3changes,and the aluminum dispersoids can coexist together with Al0.1Sb2Te3 matrix,which confirms the effect of aluminum doping on target organization structure;with the increase of the etching depth from 0 to 405.9 nm,the aluminum’s valence is gradually transferred from the compound state of Al2O3 to simple substance state,and the area depth of aluminum dominated by Al 2O3 is about 90 nm;XPS analysis with the etching depth of 405.9 nm shows the aluminum of Al0.1Sb2Te3 matrix influences target structure by effective formation of AlSb.
作者
孙川希
周增林
谢元锋
夏扬
Sun Chuanxi;Zhou Zenglin;Xie Yuanfeng;Xia Yang(GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China)
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2019年第7期2203-2207,共5页
Rare Metal Materials and Engineering
基金
国家重点研发计划专项项目(2017YFB0306000)
