摘要
根据W波段行波管的设计要求,考虑加工设备的固有精度,编写测量程序,实现了折叠波导多周期微结构的自动精密测量。实际应用时,利用视频影像测量显微镜、工具显微镜、激光共聚焦显微镜和高度计完成了W波段行波管折叠波导慢波结构关键几何尺寸的全自动和半自动测量,分析了测量误差的来源,提出了最大限度减小误差的方法,各个尺寸的测量精度全部控制在1.5jim以内,测量时间从原来的3h缩短到了1h以内,显著提高了工作效率,为折叠波导行波管的批量生产节约了时间和人力成本。
Herein, we reported the novel technique for full-and semi-automatic measurement of the microstructures of multi-period folded waveguide ( FWG) of traveling wave tube (TWT). The dimensions of the microstructure of W-band FWG slow wave structure, including, but not limited to the period length, groove 's depth/width/steep-ness, straight-edge length, e-beam channel radius, surface roughness of serpentine-groove bottom and assembly hole size, were precisely measured with video measuring microscope, tool microscope, laser confocal microscope and altimeter;and the measured results were processed with self-developed data-analysis programs. Moreover, the measurement errors were analyzed. The test results show that the measurement accuracy ( time) can be controlled to w.hin 1. 5 ixm (60 min). We suggest that the new time-saving,high-efficiency measurement method be of some technological interest in production of FWG-TWT.
作者
王建
李飞
孙宇辉
赵建东
段海霞
Wang Jian;Li Fei;Sun Yuhui;Zhao Jiandong;Duan Haixia(Institute of Electronics, Chinese Academy of Science, Beijing 100407 , China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2019年第4期316-325,共10页
Chinese Journal of Vacuum Science and Technology
关键词
折叠波导
尺寸测量
误差分析
行波管
Folded waveguide
Dimension measurement
Error analysis
Traveling wave tube
