摘要
采用自主设计的带有气氛保护、冒口保温、磁力搅拌和强制冷却功能高频熔炼-铸造-搅拌一体化设备制备银基合金靶材坯料。研究了Au、Ge协同作用对银基合金靶材坯料的组织和性能的影响。结果表明,随着Au、Ge添加量的增加,银基合金靶材微观组织细化,二次枝晶变短,抗硫化性提高,且在Au、Ge添加量均为1.0%(质量分数)时,银基合金靶材坯料的耐硫化性能最佳。随着Au Ge添加量增加,元素偏析现象加剧,在Agl.5Cu0.1Y1.5Au靶材的晶界处出现少量的富集区,使靶材的抗硫化和耐蚀性有所下降。
Silver-based alloy targets were prepared by self-designed melting-casting-stirring equipment. The influence of Au and Ge on the microstructure and property of silver-based alloy targets were studied. The results indicate that with the increase of the addition amount of Au and Ge, the microstructure of the silver-based alloy targets is refined, the second dendrite is shortened and the sulfidation resistance is increased;when the addition of Au and Ge is 1.0 wt%, the silver-based alloy targets have the best sulfidation resistance.However, the phenomenon of element segregation is aggravated with the further increase of the addition of Au and Ge and a few clustering enrichment regions appear at the grain boundaries of Agl.5 Cu0.1 Y1.5 Au alloy targets. Therefore, the sulfidation resistance is decreased with the increase of the addition of Au and Ge beyond 1.0 wt%.
作者
张德胜
张勤
杨洪英
Zhang Desheng;Zhang Qin;Yang Hongying(Northeastern University,Shenyang 110819,China)
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2019年第3期987-993,共7页
Rare Metal Materials and Engineering
基金
国家自然科学基金(U1608254)
关键词
银基合金
靶材
耐硫化性
金
锗
Ag-based alloys
sputter targets
sulfidation resistance
Au
Ge
