摘要
Nanocomposite Cr C/hydrogenated amorphous carbon(nc-CrC/a-C:H) coatings were deposited by a hybrid beams system comprised of a hollow cathode ion source and a cathodic arc ion-plating unit with varying H_2 flow rates. The influences of H_2 flow rates on the morphologies, microstructures, and properties of the coatings were systematically studied. The morphologies and microstructures of the coatings were characterized by SEM, AFM, XPS, Raman spectroscopy, GIXRD, and HRTEM. The mechanical and tribological properties were measured by a nano-indenter, scratch tester, and ball-ondisk tribometer. The wear tracks were evaluated using 3D profilometer, optical microscope, and EDS analysis. It has been found that a moderate H_2 flow rate can effectively smooth the surface, enlarge the fraction of a sp^3 bond, and improve the properties. The coating exhibits the highest hardness and elastic modulus at the H_2 flow rate of 40 sccm. A superior combination of adhesion strength,friction coefficient, and wear resistance can be achieved at the H_2 flow rate of 80 sccm.
Nanocomposite Cr C/hydrogenated amorphous carbon(nc-CrC/a-C:H) coatings were deposited by a hybrid beams system comprised of a hollow cathode ion source and a cathodic arc ion-plating unit with varying H_2 flow rates. The influences of H_2 flow rates on the morphologies, microstructures, and properties of the coatings were systematically studied. The morphologies and microstructures of the coatings were characterized by SEM, AFM, XPS, Raman spectroscopy, GIXRD, and HRTEM. The mechanical and tribological properties were measured by a nano-indenter, scratch tester, and ball-ondisk tribometer. The wear tracks were evaluated using 3D profilometer, optical microscope, and EDS analysis. It has been found that a moderate H_2 flow rate can effectively smooth the surface, enlarge the fraction of a sp^3 bond, and improve the properties. The coating exhibits the highest hardness and elastic modulus at the H_2 flow rate of 40 sccm. A superior combination of adhesion strength,friction coefficient, and wear resistance can be achieved at the H_2 flow rate of 80 sccm.
基金
supported by the National Natural Science Foundation of China(Nos.11275141 and 11175133)
the International Cooperation Program of the Ministry of Science and Technology of China(No.2015DFR00720)
the Center for Electron Microscopy of Wuhan University
the Center of Nanosci. and Nanotech,Research of Wuhan University
the Analysis and Test Center of Wuhan University
