摘要
在微机电系统(micro-electro-mechanical system,MEMS)热电堆器件的测试中,如何给热电堆器件施加合理的周期性红外辐射激励是能否得到正确器件参数的关键。在开发适用于MEMS热电堆器件的晶圆级测试系统的过程中,提出了一种光学能量传输方案,该方案采用MEMS红外光源JSIR450替代了传统黑体炉作为红外辐射激励源,采用快门替代了光学斩波器对红外信号进行周期性调制。通过实验证明了该方案的有效性,且通过积分的方法证明了MEMS红外光源能量发射端的黑体发射率满足项目要求。
In the test of MEMS thermopile device,how to put thermopile devices under reasonableperiodic infrared radiation incentive is one of the key steps if we want to get the accurate device parameter.As for the infrared incentive of the thermopile device in the development process of wafer level test system,it proposes a optical energy transmission method,different from the traditional test method of MEMSthermopile devices,this method has adopted the MEMS infrared illuminant JSIR450 to replace thetraditional blackbody furnace as infrared radiation source and used the shutter to replace the opticalchopper to realize periodic modulation of the infrared signal. We have validated that the method has goodeffect by experiments and proved that the blackbody emissivity of the MEMS infrared energy light sourcecan meet the project requirements with integral method.
作者
王振宇
潘滔
叶雨欣
焦斌斌
孔延梅
WANG Zhenyu;PAN Tao;YE Yuxin;JIAO Binbin;KONG Yanmei(School of Software and Microelectronics at Wuxi,Peking University,Wuxi 214125,Jiangsu,China;Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China)
出处
《江汉大学学报（自然科学版）》
2016年第3期246-252,共7页
Journal of Jianghan University：Natural Science Edition
基金
国家高技术研究发展计划(863计划)资助项目(2013AA041109)
关键词
热电堆器件
红外辐射激励
MEMS红外光源
快门
黑体发射率
thermopile device
infrared radiation incentive
MEMS infrared illuminant
shutter
blackbody emissivity
