1Paul O. A thermal Van Der Pauw test structure[J]. IEEE Trans Semic Manuf, 2000,13(2):159-166.
2Hafizovic S, Paul O. Temperature dependent thermal conductivities of CMOS layers by micromachined thermal Van Der Pauw test structures[J]. Sensors and Actuators, 2002,97-98:246-252.
3Paul O, Von Arx M, Baltes H. Process-dependent thermophysical properties of CMOS IC thin films[J]. Sensors and Actuators, 1995,37:178-181.
