摘要
本文介绍清洗平板显示玻板的新工艺新设备。具体介绍玻板的抗蚀性能、灵巧清洗台,超声波无酸碱清洗工艺,红外光、紫外光净化工艺。
The new technique and new equipments for cleaning the glass substrates of flat panel displays are described. The corrosion resistance of glass, the ingenious rinsing table and some cleaning techniques such as ultrasonic cleaning in dilute detergent, UV-ozone dry cleaning and ultrared heat cleaning are described.
出处
《光电子技术》
CAS
1991年第3期13-19,共7页
Optoelectronic Technology
