摘要
综述了体积为毫米或微米级的新型微电机,包括静电式(摆动式、谐波式、线性式、旋转式和集成式)、准静态感应式和谐振式,介绍了这类微电机的结构原理和发展动向。
Vailous new micromotors with sizes in the millimeter and micrometer ranges are described comprehensively, including the electrostatic (vibrational harmonic, linear, rotational and integrate types), quasi-static inductive and harmonic motors. The construction principle and developing trend of these kinds of micromo- tors are introduced.
出处
《自动化仪表》
CAS
北大核心
1991年第8期1-4,共4页
Process Automation Instrumentation
