摘要
本文论述了在有多维微驱动器定位系统中 ,应用 PID和 FU ZZY联合控制的方式解决定位中存在的速度调节与系统振荡的矛盾 ;应用坐标变换方式解决多维定位系统中的干涉现象 ;以及在实际系统中 ,采用直线电机与微驱动器联合驱动的硬件构架 ,并配以上述控制策略 ,对定位系统进行粗定位和微定位 ,最终实现大范围和高精度的定位系统 .
In this paper, an approach is presented to resolve confliction between speed adjustment and system oscillation in a submicro-positioning by using PID and FUZZY controlling method. A coordinate transformation is applied to minimization the inter-axial interference in the multi-dimensional submicro-actuator positioning system. In the experiment, the composition for the control system is made of three linear motors and three submicro-actuators, with is capable of realizing the positioning of a wide range and submicro precision.
出处
《信息与控制》
CSCD
北大核心
2002年第5期446-450,共5页
Information and Control
基金
陕西省重大科技攻关项目
关键词
集成电路
制造工艺
软刻蚀工艺
多维微驱动器
纳米定位系统
multi-dimensional submicro-actuator, PID and FUZZY control, coordinate transformation, positioning system
