摘要
一种用于表面形貌测量的复合测量位移传感器 ,它将接触式触针传感器和非接触式光学传感器巧妙融合在一起 ,使得一个表面形貌测量位移传感器同时具备接触和非接触两种测量手段。其特点是利用了一个触针—反射镜测杆机构 ,将激光聚焦光束直接在被测工件表面扫描转换为对测杆上固接的反射镜扫描。其垂直测量范围 1 mm,垂直测量分辨率 5nm。该传感器工作稳定可靠 ,使用灵活 。
A compound probe for surface topography measurement is presented. Utilizing a detachable stylus-mirror system, the focus-detection-based probe is capable of contact and non-contact surface measurement, which makes it suitable for a wider range of applications. Calibration results show that the developed probe can measure larger than ±500 μm with good linearity for both contact and non-contact measurement. The vertical measurement resolution of the probe is 5nm.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2002年第18期1545-1548,共4页
China Mechanical Engineering
基金
武汉市青年科技晨光计划资助项目 ( 2 0 0 15 0 0 5 0 34)
