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亚稳态富硅烷—氮—氧混合气制备及其着火特性 被引量:1

Preparation and Ignition Behavior of Silane-Rich Metastable Mixture of SiH_4-N 2-O_2
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摘要 采用氮气预稀释方法制备了亚稳态的富硅烷—氮—氧混合体系 ,对这种混合气的稳定性和着火特性进行了实验 ,表明氮气预稀释对抑制硅烷着火有明显效果 ,所制备的亚稳态混合物有较高的稳定性 ,但是释放时的阻流会引发爆炸 ,只有在总压力低于 0 .5 MPa,氮气含量高于 86 % V/V时才能抑制爆炸的发生。 Silane rich metastable silane N 2 O 2 mixture has been prepared by pre dilution with nitrogen.Stability and igniting behavior of the mixture has been examined.It is shown that pre dilution with nitrogen effectively depresses the ignition of silane,and the metastable mixture is stable during storage,unless release of the mixture is being restricted at the moment an explosion in duced.The explosion will happen until total pressure below 0 5 MPa and nitrogen concentration higher than 86% V/V .
出处 《低温与特气》 CAS 2002年第4期35-37,共3页 Low Temperature and Specialty Gases
关键词 亚稳态富硅烷 混合气 制备 着火特性 爆炸 氮气 氧气 稳定性 silane ignition explosion metastable system
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参考文献2

  • 1FTHENAKIS Vasilis M,MOSKOWITZ Paul D.An Assessment of Silane Hazards[].Solid State Technology.1990
  • 2BRITTON L G.Combustion Hazards of Silane and Its Chlorides[].Plant Operations Progress.1990

同被引文献1

  • 1BRITTON Laurence G TAYLOR Patrick.改进你操作硅烷的方法[J].Semiconductor International,1991,(4):89-92.

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