摘要
力学探针是近年来发展的一种先进的微区力学性能测试方法。本文介绍了力学探针的工作原理 ,以及采用力学探针技术准确测量薄膜力学性能的两步压入法 。
Mechanical microprobe technique has been the newly developed way of studying mechani cal properties of selected area in materials.In this paper,an introduction of the basic principles of mechanical microprobe and the two-step method,which can correctly measure the mechanical properties of thin films,is presented.The mechanical microprobe exhibits great advantage and application potential for research of mechanical properties of materials.
出处
《热处理》
CAS
2002年第3期1-5,共5页
Heat Treatment
关键词
力学探针
薄膜
硬度
弹性模量
两步压入法
微区分析
mechanical microprobe
thin films
hardness
elastic modulus
two-step penetration method
