摘要
本文就IC电子厂的规划设计和运行调试进行分析,并着重就净化,恒温恒湿,运行调试中易出现的问题进行讨论。
The text analyses how to design and run and debug the air conditioning of the IC wafer factory. There are three emphases. The first is cleaning. And the second is steady - state temperature and humidity. The third is the problems which may happen very often during running and debugging the air conditioning system.
出处
《洁净与空调技术》
2002年第3期46-48,共3页
Contamination Control & Air-Conditioning Technology
关键词
IC厂
空调
净化系统
运行
调试
恒温恒湿
风机
噪音
湿度
干冷盘管
Steady - state temperature and humidity Fan filter unit ( FFU) Noise Temperature Humidity Dry cooling coil Heating coil Cool coil
