摘要
为了解决MEMS陀螺仪开环检测带宽窄、量程低、线性度差等问题,设计了机电结合带通ΣΔ闭环检测系统。首先设计4阶带通纯电学ΣΔ调制器,结合MEMS陀螺的机械结构,提出机电结合闭环检测系统结构及参数获取方法。该环路采用脉冲密度反馈方式,考虑输入热噪声、正交误差等非理想因素,建立闭环检测系统的非理想模型。仿真结果表明：对比开环检测,该闭环反馈力平衡了哥氏力,抑制了哥氏振动,陀螺的响应位移降低了4个数量级,响应速度提升了0.6 s;当陀螺量程为300°/s、带宽200 Hz时,信噪比（SNR）达到了113.2 dB。基于现场可编程门阵列（FPGA）开发了MEMS陀螺测控系统电路并进行实际测试,结果表明闭环检测标度因数非线性、测量范围和带宽分别提高了4倍、1.5倍和1.5倍,系统性能得到了有效提升。
In order to solve the problems such as narrow bandwidth, low range and poor linearity in MEMS gyroscope open-loop detection, an electromechanical bandpass ΣΔ closed-loop detection system was designed. A fourth-order bandpass electrical ΣΔ modulator was designed firstly. A method of determining the structure and parameters of the electromechanical closed-loop detection system was proposed by combing the mechanical structure of the MEMS gyroscope. A pulse density feedback was used in the loop. Considering the non-ideal factors such as input thermal noise, quadrature error and so on, the non-ideal model of the closed-loop detection system was estab- lished. The simulation results show that compared with the open-loop detection, the closed-loop feedback force is effective in balancing Coriolis force and inhibiting Coriolis vibration. The response displacement of the MEMS gyroscope is decreased by 4 orders of magnitude, and the re- sponse speed is increased by 0.6 s. When the range of the gyroscope is 300°/s and the bandwidth is 200 Hz, the signal-to-noise ratio （SNR） can reach 113.2 dB. The circuit of the MEMS gyro- scope measurement and control system was developed based on field-programmable gate array （FPGA）. The test results show that the non-linearity of closed-loop detection scale, measuring range and bandwidth are increased by 4 times, 1.5 times and 1.5 times, and the system performance is improved effectively.
作者
王亚林
杨拥军
任臣
Wang Yalin;Yang Yongjun;Ren Chen(The 13th Research Institute,CETC,Shijiazhuang 050051,China)
出处
《微纳电子技术》
北大核心
2018年第12期895-901,921,共8页
Micronanoelectronic Technology
