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成膜参数对TiN—MoS_2/Ti复合薄膜摩擦学性能的影响 被引量:7

INFLUENCE OF PROCESSING PARAMETERS ON THE CHEMICAL COMPOSITION AND PERFORMANCE OF TiN-MoS_2/Ti COMPOSITE COATINGS DEPOSITED BY NANO- COMPOSITE PLATING TECHNOLOGY
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摘要 本研究利用钻削、切削实验及XPS测试等手段考察了非平衡纳米复合等离子体镀膜技术中成膜参数对TiN—MoS2 /Ti复合涂层的摩擦学性能及其理化性能的影响。实验发现靶距、沉积气压及Ti添加剂含量等参数的变化对复合涂层的成分和性能产生了明显的作用。结果表明 ,通过调整选择合适的工艺参数 ,可以得到较高耐磨寿命的TiN—MoS2 Coatings have been deposited with the nano composite unbalanced plasma plating technology. Influence of the processing parameters on the tribological and physical chemical properties of TiN-MoS 2/Ti composite coatings was examined with drilling and turning experiments and XPS. Through the experiments, it was found that changes of parameters such as electrode spacing, deposit pressure and the contents of Ti additives influenced considerably on the chemical composition and performance of the composite films. It indicated that TiN-MoS 2/Ti composite coatings with higher abrasion durability can be obtained by adjusting and choosing appropriate processing parameters.
出处 《兵工学报》 EI CAS CSCD 北大核心 2002年第3期395-398,共4页 Acta Armamentarii
关键词 成膜参数 TiN-MoS2/Ti复合涂层 摩擦学性能 切削性能 非平衡纳米复合等离子体镀膜 XPS测试 TiN-MoS 2/Ti composite coatings, cutting characteristic, nano composite unbalanced plasma plating technology, XPS testing
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