摘要
近年来多元纳米复合涂层的发展,为制备高速切削、干式切削高质量涂层刀具提供了更优异的解决方案。采用国际新型高功率脉冲磁控溅射技术,制备了不同N_2/Ar流量比的AlCrSiN高铝含量纳米复合涂层。运用电子扫描显微镜、纳米划痕仪对涂层力学性能进行表征。结果表明:N_2/Ar流量比的增加使AlCrSiN涂层膜基结合强度显著下降。N_2/Ar=1/4时临界载荷最大为66N.临界载荷的变化由沉积粒子动能主导同时与涂层显微结构的演化以及HiPIMS技术的工艺特点密切相关。
Recently,the development of multi-element nanocomposite coating provide a more excellent solution for preparing high quality coated cutting tools in high-speed cutting and dry cutting conditions. In this paper,a new high power pulsed magnetron sputtering technique was applied to prepare AlCrSiN coatings with different N_2/Ar flow raios. High aluminum content nano-composite coatings were obtained. The mechanical properties of the coatings were characterized by scanning electron microscopy and nano-scratch tester. The results show that with the increase of N_2/Ar flow ratio,the adhesive strength of AlCrSiN coatings decrease significantly. The maximum critical load of 66 N was abtained at N_2/Ar =1/4.The decline of critical load is dominated by the kinetic energy of deposited particles,and is also closely related to the evolution of coating microstructure and the process characteristics of Hi PIMS techniques.
出处
《装备制造技术》
2017年第12期67-69,共3页
Equipment Manufacturing Technology
基金
国家自然科学基金项目(No.51301181)
天津市应用基础与前沿技术研究计划重点项目(15JCZDJC39700)
天津市高等学校创新团队培养计划项目(TD12-5043)
