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微小通道沿程压力测量方法研究 被引量:2

Research of the measurement method for the pressure distribution along the micro/mini-channel
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摘要 设计并搭建了一套微小通道沿程压力的测量系统,包括PMMA通道和压力方腔、微应变传感器及多通道应变仪等。利用注射泵的推进方法提供微通道静压,采用FCO510型高精度微差压计的测量值作为标准压力,通过多通道应变仪测量微通道方腔中各个应变片的应变值,从而建立标准压力和应变之间的标定函数。分别对3种微压芯片在80、70、60及50mL/min等4种不同流量下的压力分布进行了测量,压力分布具有良好的线性规律。不确定度分析表明压力误差的相对扩展不确定度范围为0.15%~6.82%,测量结果的有效性和可靠性较高。 In this study,a system was designed and built up for the pressure measurement along micro/mini-channel,which mainly includes micro/mini-channel and square pressure cavities on PMMA chip,micro-strain sensors and multi-channel strain instruments.The static pressure in micro/mini-channel was provided by the syringe pump,and the high precision pressure values measured by the micromanometer of FCO510 was employed as the standard pressure.The strain values from the strain sensors installed on the square pressure cavities were obtained by multi-channels strain gauge,and the calibration functions between the standard pressure and the strain were established.The pressure distributions of three kinds of micro pressure chips were measured under flow rates of 80,70,60 and 50 mL/min,respectively.The pressures have good linear distribution.The uncertainty analysis indicates that the relative uncertainty of the pressure error is between 0.15%and 6.82%.The validity and reliability of pressure measurement are high.
作者 王昊利 汪兵
出处 《实验流体力学》 CSCD 北大核心 2017年第6期56-61,共6页 Journal of Experiments in Fluid Mechanics
基金 国家自然科学基金(11472261 11172287) 金陵科技学院高层次人才启动项目(2016)
关键词 微小通道 沿程压力 应变测量 不确定度 micro/mini-channel pressure along the channel strain measurement uncertainty
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  • 1黄惠民.转子流量计测量不确定度评定[J].中国测试技术,2004,30(5):39-41. 被引量:3
  • 2张炎,林鸿溢.带质量块硅悬臂梁加速度传感器的特殊工艺[J].传感器技术,1994(1):29-32. 被引量:3
  • 3吴紫峰,田雷,温鹏宇.微型双岛硅膜制作中的削角补偿方法研究[J].传感器技术,1996,15(6):21-23. 被引量:3
  • 4PUERS B,SANSEN W. Compensation structures forconvex conner micromachining in silocon[J]. Sensor and Acttuators, 1990 , A21-A22 : 1036-1041.
  • 5.JJG860-1994压力传感器(静态)检定规程[M].北京:计量出版社,1996..
  • 6.JJF1059-1999 测量不确定度评定与表示[M].北京:计量出版社,2000..
  • 7SHERYLL Goecke Powers, LANNIE D Webb. Flight wing surface pressure and boundary-layer data report from the F-Ill smooth variable-camber supercritical mission adaptive wing [ R]. NASA TM-4789.
  • 8KIM Namsoo P, HOLLAND Mark J, TANIELIAN Minas H, et al. MEMS sensor multi-chip module assembly with TAB carrierpressure belt for aircraft flight testing [ J ]. Boing Phantom Works. IEEE, 0-7803-5908-9,2000 : 689-696.
  • 9GOLFARELLIL Alessandro, ZAGNONIL Michele, PROLI2 Paolo, et al. Acquisition system for pressure sensor network [ J ]. IEEE, 0-7803-8692-2/04,2004 : 579-582.
  • 10KOVACS Gregory T A. Micromachined transducers sourcebook [ M]. New York : McGraw-Hill, 1998.

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