摘要
对于运动误差测量系统中几何误差较大的问题,提出一种基于激光干涉仪的运动误差测量系统设计。设计的运动误差测量系统硬件由计算机、电气控制柜、电动机、激光干涉仪、同心仪等组成。软件系统引入一种测量数学模型,能够进行快速误差鉴别、行踪测量,通过测量模型的数据有效地避免了几何误差的出现,提高了运动误差测量系统测量的准确度。实验验证了基于激光干涉仪的运动误差测量系统的设计方案的有效性。
Aiming at the large geometric error existing in the motion error measurement system, a design of the motion er- ror measurement system based on laser interferometer is proposed. The hardware of the designed motion error measurement sys- tem is composed of computer, electric control cabinet, motor, laser interferometer, concentric device, etc. A mathematical model of measurement is introduced into the software system, which can quickly identify the error and measure the track, effectively avoid the geometric error by means of the data of the measurement model, and improve the measurement accuracy of the motion error measurement system. The effectiveness of the design scheme of the motion error measurement system based on laser inter- ferometer was verified with experiment.
出处
《现代电子技术》
北大核心
2017年第24期178-180,共3页
Modern Electronics Technique
基金
天津市自然科学基金重点项目(15JCZDJC39000)
关键词
激光干涉仪
运动误差测量
几何误差避免
激光干涉
laser interferometer
motion error measurement
geometric error avoiding
laser interference
