摘要
亚表面损伤(SSD)的系统表征和准确检测是控制光学材料加工表层损伤的关键。将SSD的表征方法和检测技术相结合,综述了光学材料SSD检测评价方法的研究进展;分析了超精密加工产生的SSD结构和表征参量;针对SSD的几何表征参量,介绍了几种典型的损伤性检测技术及其技术特点和适用范围;重点介绍了几种满足超精密加工检测要求的无损伤检测技术,并分析了其技术优势和发展瓶颈;对比了国内外SSD的表征与检测技术水平,并对SSD检测技术的发展趋势进行了展望。
The systematic characterization and accurate detection of subsurface damage （SSD） are the key to controlling the surface damage in the processing of optical materials. The research progresses on the detection and evaluation methods of SSD in optical materials are reviewed by combining the SSD characterization methods and the detection technologies. The structures and the characterization parameters of SSD induced by the ultra-precision machining are analyzed. Several typical destructive detection technologies and their technical features and application ranges are introduced aiming at the geometric characterization parameters of SSD, Several non-destructive detection technologies which meet the detection requirements of ultra-precision machining are introduced emphatically, and their technical advantages and development bottlenecks are also analyzed, The comparison for the SSD characterization and detection technologies between at home and abroad is performed, and the developing trend of SSD detection technology is presented.
出处
《激光与光电子学进展》
CSCD
北大核心
2017年第10期25-36,共12页
Laser & Optoelectronics Progress
基金
国家自然科学基金面上项目(11672356)
浙江省教育厅一般科研项目(Y201636134)
关键词
材料
亚表面损伤
损伤表征
损伤性检测
无损伤检测
materials
subsurface damage
damage characterization
destructive detection
nondestructive detection
