摘要
Two-dimensional (2D) Van der Waals heterostructures have aroused extensive concerns in recent years. Their fabrica- tion calls for facile and efficient transfer techniques for achieving well-defined structures. In this work, we report a simple and effective dry transfer method to fabricate 2D heterostructures with a clean interface. Using Propylene Carbonate (PC) films as stamps, we are able to pick up various 2D materials flakes from the substrates and unload them to the receiving substrates at an elevated temperature. Various multilayer heterostructures with ultra-clean interfaces were fabricated by this technique. Furthermore, the 2D materials can be pre-pattemed before transfer so as to fabricate desired device structures, demonstrating a facile way to promote the development of 2D heterostructures.
Two-dimensional (2D) Van der Waals heterostructures have aroused extensive concerns in recent years. Their fabrica- tion calls for facile and efficient transfer techniques for achieving well-defined structures. In this work, we report a simple and effective dry transfer method to fabricate 2D heterostructures with a clean interface. Using Propylene Carbonate (PC) films as stamps, we are able to pick up various 2D materials flakes from the substrates and unload them to the receiving substrates at an elevated temperature. Various multilayer heterostructures with ultra-clean interfaces were fabricated by this technique. Furthermore, the 2D materials can be pre-pattemed before transfer so as to fabricate desired device structures, demonstrating a facile way to promote the development of 2D heterostructures.
基金
supported by the National Basic Research Program of China(Grant Nos.2013CB934500 and 2013CBA01602)
the National Natural Science Foundation of China(Grant Nos.61325021,11574361,and 51572289)
the Key Research Program of Frontier Sciences,CAS,(Grant No.QYZDB-SSW-SLH004)
the Strategic Priority Research Program(B),CAS(Grant No.XDB07010100)