摘要
Duhocamis(双空心阴极金属离子源)是在GSI间热阴极PIG离子源基础上,利用空心阴极圆筒取代空心阳极圆筒,磁镜场取代均匀磁场的强流金属离子源。通过系列变化空心阴极与间热阴极电源电压的弧放电试验,了解其对离子源工作及金属等离子体形成的贡献和影响。试验结果分别给出了空心阴极与间热阴极弧放电特性曲线,它们的弧压对弧流关系具有不同的弧阻抗特性;通过磁分析器对等离子体中各种离子成分比例的分析,进一步显示出空心阴极与间热阴极弧放电两者相互强化和联动的协同效应;尤其空心阴极电位从零开始变化的弧放电试验,揭示了离子源从PIG空心阳极放电向双空心阴极放电转换的过程;协同效应不仅证实空心阴极作为赖以产生金属离子的溅射电极,而且对于确立离子源工作模式与优化产生所需金属离子的放电条件至关重要。
The Duhocamis （dual hollow cathode metal ion source） was derived from the indirectly heated cathode GSI-PIG ion source, which was modified by introducing a hollow cathode cylinder and a magnetic bottle-shaped field to replace a hollow anode cylinder and a homogeneous magnetic field. To understand the different discharge characteristics of Duhocamis than that of PIG, a series of arc discharge experiments with variation of the hollow cathode and the heated cathode power supply voltages were realized, and the dual hollow cathode and the indirectly heated cathode arc discharge curves were presented. The effects of these voltages on arc discharge and metal plasma formation with their different impedance characteristics were discussed. It is emphasized the synergistic effect of hollow cathode and heated cathode on arc discharge. Especially, a transformation process of discharge characteristics from the PIG hollow anode discharge mode to the dual hollow cathode discharge has been revealed when the hollow cathode potential started from zero. Therefore, the hollow cathode can not only provide the materials for metal ions as a sputter cathode, but also greatly enhance the arc discharge of the source and establish the metal plasma with the dual hollow cahode discharge because of the synergistic effect.
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2017年第4期8-13,共6页
China Surface Engineering
基金
国家自然科学基金(11475011)~~
关键词
离子源
金属离子束
潘宁放电
空心阴极
ion source
metal ion beam
Penning discharge
hollow cathode
