摘要
为了系统研究氟掺杂对非晶碳基薄膜摩擦学行为的影响,以C_2H_2和CF_4为气源,通过等离子体增强化学气相沉积方法制备不同F含量的非晶碳基薄膜.采用XPS、SEM、Raman光谱以及纳米压痕等技术测定薄膜的微观结构、化学组成和力学性能,利用球-盘式往复摩擦试验机评价薄膜与不同配副材料的摩擦磨损性能.结果显示:较低F含量并未显著影响薄膜与强碳黏着对偶Ti、WC和Si_3N_4的摩擦系数;少量F原子掺杂明显增加了薄膜与弱碳黏着对偶ZrO_2和Al_2O_3的摩擦系数;薄膜与GCr15对偶的摩擦系数随F含量增加而明显升高;高F含量导致薄膜与Cu对偶的摩擦系数产生明显波动,而导致薄膜与Al对偶的摩擦系数显著增加;值得注意的是,高F含量薄膜在不同体系中都表现出高摩擦低磨损的特点.高活性F原子与对偶材料的摩擦化学作用能够合理解释不同体系摩擦学行为.
In order to understand the influence of fluorine incorporation on the tribological behavior of amorphous carbon films, fluorinated amorphous carbon-based （a-C：H：F） films containing different F contents were synthesized by plasma-enhanced chemical vapor deposition system, using C2H2 and CF4 as precursor. Their microstructure, chemical composition and mechanical properties were examined by various techniques, i.e. X-ray photoelectron spectrometer, scanning electron microscopy, Raman and nanoindenter. Tribological properties of films were tested against different mating materials by reciprocating sliding tribometer with a ball-on-disk contact geometry. Results indicate that friction behavior of a-C：H：F films depended on the adhesion of counterpart material to C and chemical affinity of F with counterpart material. In sliding against mating materials with strong adhesion to carbon （Ti, WC and Si3N4）, the a-C：H：F films with relatively low F contents showed similar friction behavior to that of a-C：H film. In sliding against inert ZrO2 and A1203 counterparts, the a-C：H：F films showed increasing friction coefficient. Friction coefficient of a-C：H：F films against GCr15 balls increased as the increase in F content, but wear rates decreased. High F content within films resulted in marked fluctuation of friction coefficient of films against Cu, and significantly increased the friction coefficient of films against A1. Noticeably, highly fluorinated films exhibited a combination of high friction and low wear. It is found that tribochemical reactions between F and mating materials reasonably explained the friction behavior of different systems.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2017年第3期357-363,共7页
Tribology
基金
国家自然科学基金项目(51305433)资助~~
关键词
非晶碳基薄膜
氟
摩擦
磨损
摩擦化学
amorphous carbon films
fluorine
friction
wear
tribochemistry
