摘要
本文介绍低能量电子发射枪,适合装备在X射线光电子能谱系统上,在进行半导体或其它导电性较差物质的光电子分析时进行样品表面的电子补偿。该电子枪主要由阴极、控制极、阳极和聚焦电极组成,具备电子束发射、电子能量调节和电子束聚焦功能。实验测试证明,该装置发射的电子束能量在0-500eV之间连续可调,电子束密度充足,电子束聚焦效果理想。
In this article,a domestic low energy electron gun is introduced.The electron gun can be equipped in X-ray photoelectron spectroscopy systems for photoelectron analysis of semiconductor and other materials with poor electric conductivities due to charge compensation.The electron gun mainly consists of cathode,wehnelt electrode,focus electrode and anode.Test results show that the electron beam is well focused with a high current density and the electron energy can be continuously adjusted in the range of 0-500eV.
出处
《真空电子技术》
2016年第1期34-37,共4页
Vacuum Electronics
基金
国家自然科学基金项目(No.51207016
No.51477023)
辽宁省高等学校优秀人才项目(No.LJQ2014046)
关键词
光电子
电子发射枪
电荷补偿
Photoelectron
Electron gun
Charge compensation
