摘要
为了研究散射测量的正向测量依据,采用严格耦合波分析理论,对1维矩形面型周期性结构衍射建模,在MATLAB环境下实现严格耦合波分析算法,并讨论了1维周期结构高度、线宽和占空比的测量特性,理论上线宽的测量可以达到纳米级分辨率。结果表明,严格耦合波分析理论精确和高效,对1维微纳米周期结构表现出了良好的测量特性。这为散射测量提供了科学性和可行性依据。
In order to study the forward measurement principle of scattering measurement, the diffraction model of 1-D periodic rectangular structure was made by rigorous coupled-wave analysis （RCWA） algorithm and programmed by MATLAB. Measurement characteristics of height, linewidth and duty cycle for 1-D periodic structure were thoroughly discussed. In theory, the measurement resolution of linewidth could achieve nanometer level. The results show that RCWA algorithm could achieve accurate and efficient purpose and its good measurement properties for 1-D periodic micro- and nano-structure provide a scientific and feasible basis for scattering measurement.
出处
《激光技术》
CAS
CSCD
北大核心
2016年第2期250-253,共4页
Laser Technology
基金
国家科技支撑计划资助项目(2012KJZC0133)
关键词
散射
微纳米测量
严格耦合波分析
光栅
scattering
micro- and nano- measurement
rigorous coupled-wave analysis
grating
