摘要
采用数值模拟的方法开展光刻物镜镜组的跌落分析,结合数值寻优的方式,以光刻物镜所能承受的最大加速度为约束条件确定缓冲结构的尺寸参数,并通过跌落实验验证数值仿真的准确性与可靠性,进而指导超精密光刻物镜缓冲包装的参数设计。利用此方法对质量为10kg、镜片口径为160mm,径厚比为8.89光刻物镜镜组进行缓冲结构设计,实验结果表明,其从10cm高度跌落后最大加速度为4.4 g,面形变化仅为0.36nm,满足超精密光学设备的动力学指标要求。
In lations are used this paper, drop numerical simu- before conducting analysis of li- thography lenses. Based on the requirement of the maximum acceleration, the cushion structure di- mensions are confirmed by the optimization solu- tion. The experimental results demonstrate the ac- curacy and reliability of the numerical simulation. Using this method, the cushion packaging of li- thography lens is designed. The mass of the lens is 10 kg, the aperture is 160mm, the radius- thick- ness ratio is 8.89. The experiment results demon- strate that the maximum acceleration is 4.4g and the lens surface changes only 0. 36 nm when the lens is dropped from 10 cm. The cushion packa- ging design meets the dynamic indicators.
出处
《机械与电子》
2015年第8期6-9,17,共5页
Machinery & Electronics
基金
国家重大专项02专项(2009ZX02205)
关键词
物镜镜组
数值模拟
跌落分析
实验验证
lithography lens
numerical simu-lation
drop analysis
experiment
