摘要
介绍了一种柱面面形干涉测量方法。该方法选用计算全息片作为柱面波转换器，能够将平面干涉仪出射的平面波转换成理想柱面波前，依此为基础，建立了柱面干涉测量系统，能够实现柱面的干涉测量。为了获得柱面的真实面形误差，分析了调整误差引起的失调像差，并给出了失调像差的分离方法。最后，以玻璃圆柱体为被测样本，对单孔径面形的重复性进行验证，20次测量结果峰谷值（PV）标准差为20．2nm，为PV平均值的0．55％。
An interferometric method to measure the cylindrical surface is proposed. The computer generated hologram was used as wavefront converter, which can convert the plane wavefront into cylindrical wavefront. With it, a cylindrical interferometric system was built. To get the real surface figure of the tested cylindrical surface, a misalignment aberrations removal method is also proposed . Lastly, several experiments were carried out to validate the proposed method and system, where the glass cylinder was chosen as a target. The repeatability of single aperture measurement was investigated by measuring the target 20 times. The standard deviation （PV） is 20. 2 nm that is 0. 55% of the average value of PV.
出处
《计量学报》
CSCD
北大核心
2015年第5期460-463,共4页
Acta Metrologica Sinica
基金
国家自然科学基金(51175318)
国家重大科技专项(2013ZX04006011-217)
关键词
计量学
柱面面形
干涉
柱面波转换器
计算全息片
调整误差
metrology
cylindrical surface
interferometry
cylindrical wave converter
CGH
adjustment errors
