摘要
利用电化学沉积法制备了铁镍合金薄膜,研究了离子浓度比、p H、温度、电流密度等工艺条件对镀层成分含量的影响,并对镀层的表面形貌、内应力、物相组成、磁性能及屏蔽效能等进行了表征,优化出了最优工艺参数,得到了性能优异、可剥离的铁镍合金薄膜。
Iron-nickel alloy film is prepared by electrochemical deposition. The effects of Fe2＋ and Ni2＋concentration ratio, p H, temperature, current density on the component content of the coatings were studied. The phaseconstitution, morphology, internal stress, magnetic and shielding properities of the coatings were characterized. Through the optimal process parameters, stripping iron-nickel alloy thin films with promising properties were obtained.
关键词
电化学沉积
软磁薄膜
铁镍合金
electrodeposition
soft magnetic film
iron-nikel alloy
