摘要
自组装制备是一种常用的三维光子晶体制备方法,在制备光子晶体过程中影响薄膜质量的因素较多。本研究对原始的双基片垂直沉积法进行了一定的改进,控制光照强弱、蒸发速度快慢等条件,沉积了不同的SiO2光子晶体薄膜样品。通过与单基片垂直沉积法得到的薄膜样品进行比较,得到了双基片垂直沉积法沉积光子晶体薄膜样品的最优实验条件。
Self-assembled is a common method for three-dimensional photonic crystals fabrication. There are many factors influencing on the quality of photonic crystals. In this work, different SiO2 photonic crystals were successfully fabricated by modifying two-substrate vertical deposition method with different evaporation rate and intensity of illumination. Through analysis on comparing with the SiO2 photonic crystals prepared by single-substrate vertical deposition method, the optimum experimental conditions to fabricate SiO2 photonic crystals have been found.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2015年第4期1127-1132,共6页
Bulletin of the Chinese Ceramic Society
基金
西藏自治区自然科学基金项目
西藏民族学院青年学人培育计划(15MYQP05)
关键词
光子晶体
自组装
双基片垂直沉积
photonic crystal
self assembled
two-substrate vertical deposition
