摘要
本文提出一种新的激光聚焦系统,用于激光微束装置能获得小于1μm的聚焦光斑。它由一个具有一定倍率的空间滤波系统和一组短焦距、长工作距离的聚焦物镜组成。文中最后给出了测试结果。
In this paper a new laser focusing system is presented. Using this system in the laser-microbeam device, focal spot size of less then 1μm was easily obtained. This system composed of a spatial filter and a focusing objective lens with long working distance (l>9mm) and short focal length (f0≤3. 25mm). Finally, the test results are given.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1991年第5期337-340,共4页
Chinese Journal of Lasers
关键词
激光
微束装置
聚焦系统
空间滤波
laser microbeam device, focusing system, spatial filter system
