摘要
As is well known, there exists a tradeoff between the breakdown voltage BVcEO and the cut-off frequency fT for a standard heterojunction bipolar transistor (HBT). In this paper, this tradeoff is alleviated by collector doping engineering in the SiGe HBT by utilizing a novel composite of P+ and N- doping layers inside the collector-base (CB) space-charge region (SCR). Compared with the single N-type collector, the introduction of the thin P+ layers provides a reverse electric field weakening the electric field near the CB metallurgical junction without changing the field direction, and the thin N layer further effectively lowers the electric field near the CB metallurgical junction. As a result, the electron temperature near the CB metallurgical junction is lowered, consequently suppressing the impact ionization, thus BVcEO is improved with a slight degradation in fT. The results show that the product of fTXBVcEo is improved from 309.51 GHz.V to 326.35 GHz.V.
As is well known, there exists a tradeoff between the breakdown voltage BVcEO and the cut-off frequency fT for a standard heterojunction bipolar transistor (HBT). In this paper, this tradeoff is alleviated by collector doping engineering in the SiGe HBT by utilizing a novel composite of P+ and N- doping layers inside the collector-base (CB) space-charge region (SCR). Compared with the single N-type collector, the introduction of the thin P+ layers provides a reverse electric field weakening the electric field near the CB metallurgical junction without changing the field direction, and the thin N layer further effectively lowers the electric field near the CB metallurgical junction. As a result, the electron temperature near the CB metallurgical junction is lowered, consequently suppressing the impact ionization, thus BVcEO is improved with a slight degradation in fT. The results show that the product of fTXBVcEo is improved from 309.51 GHz.V to 326.35 GHz.V.
基金
supported by the National Natural Science Foundation of China(Grant Nos.60776051,61006059,and 61006044)
the Beijing Municipal Natural Science Foundation,China(Grant Nos.4142007,4143059,4082007,and 4122014)
the Beijing Municipal Education Committee,China(Grant Nos.KM200710005015 and KM200910005001)