摘要
本文用X射线衍射和扫描电镜能谱研究了铁基基体中铁的扩散,及其对TiCl_4/H_2/N_2系统,化学气相沉积TiN涂层的组织、结构和性能的影响。利用本文提出的铁原子表面扩散机理,以及利用其他研究者的结论,能解释实验结果。
The effects of iron atom diffusion in CVD TiN coating on the structure,texture and properties of the CVD TiN coating deposited on iron-base Substrates in TiCl_4/H_2/N_2 system were studied by using X-ray diffraction and Scanning electron microscope energy spectrum in this paper. The experimental results can be interpreted by using the mechanism proposed for the iron atom surface diffusion in CVD TiN coating in this paper and other conclusions obtained by some investigators.
关键词
化学气相沉积
TIN
涂层
铁
基体
Chemical Vapour Deposition
Titanium Nitride
Coating.
