摘要
以激光在太阳能领域的应用为例,介绍了激光刻槽设备光机系统的组成及工作原理。该系统使用532nm短脉冲激光器,采用双激光器四分光路、两级激光扩束设计,重点解决了两级扩束自动调焦的问题。在多晶硅片上进行了刻槽试验,槽宽20μm^40μm,刻线深度可调节,线宽及线深均符合要求。
It introduces the principle of laser scribing system and its opto -mechanial system .Using 532 nm short pulsed laser , it designs the two lasers and four -way light splitters structure , solves the two echelon beam expan-ding and automatic focusing problem .The widths of scribing lines are from 20um to 40um, and the depths can be adjusted .The results show that both widths and depths of the scribing lines meet the requirements .
出处
《机械设计与制造工程》
2014年第8期6-9,共4页
Machine Design and Manufacturing Engineering
关键词
激光刻槽
两级扩束
光机设计
Laser Scribing
Two Echelon Beam Expanding
Opto-Mechanical Design
