摘要
应用改造的原子力显微镜 (AFM )作为传感系统 ,配合精密回转气浮轴系和三维微定位装置 ,实现了对激光核聚变靶球圆周方位形状误差的精密测量。采用该测量技术获得的靶球表面几何参数的测量数据及分析结果可为制靶工艺提供检测手段 。
The paper presents a measurement system which uses reformed atomic force microscope(AFM) as sensor, combined with precision rotating air bearing and 3 D micro positioning device. The precision measurement on shape error of the inertial confinement fusion(ICF) target's circle is carried out. The results show that this method can be applied in the technology of ICF target making and can provide the accurate data of target's surface profile for experiments of ICF target practice.
出处
《原子能科学技术》
EI
CAS
CSCD
2002年第4期361-363,共3页
Atomic Energy Science and Technology
