摘要
介绍了一种基于光针法的表面形貌测量装置,它能在线测量加工工件圆周方向的波纹度和轴向表面轮廓形貌,其垂直分辨率为0.02～0.10μm,横向分辨率为30～50μm。切削试验表明,该装置能够在线识别刀具上的积屑瘤、切削过程中的颤振和刀具磨损对加工表面形貌的影响。
In order to control the quality of machined surface, it is indispensable to perform on-line measurement and identification of the morphology. A measuring system based on the optical stylus method for on-line measurement of the waviness of a machined workpiece in the circumferential direction and the surface roughness of axial! profile has been developed. Its vertical resolution is 0.02～0.1μm and the horizontal resolution is 30～50μm. Cutting test results show that the measuring system developed is capable of identifying the influences of the built-up edge on cutting tools, of the selfexcited vibration in the cutting process and of the tool wear on the machined surface morphology.
出处
《宇航计测技术》
CSCD
北大核心
1991年第2期20-24,共5页
Journal of Astronautic Metrology and Measurement
基金
教委博士点基金
关键词
光针法
表面状态
切削加工
Optical stylus method, Surface morphology, Cutting processing, On-line measurement
