摘要
基于硅结构的微流体控制系统 (μFCs)是微机电系统 (MEMS)中的一个重要分支 ,可广泛用于生物、医学、化工、电子等领域。主要综述了微流体控制系统中的微流体传感器、微型泵、微型阀的工作结构原理及其国内外研究现状 ,同时还探讨了集成微流体控制系统的研究现状。
Micro fluidic controlling system (μFCs) based on silicon structure is an important part of Micro-electro-mechanical Systems (MEMS) and has great wide applications in the future in many fields such as biology, medicine, chemistry, electronics,and so on. The current researches at home and abroad,the structural designs and working principles of micro fluidic controlling systems, including micro fluidic sensors, micropumps and microvalves, are presented and discussed.The current researches on the integrated μFCs are also given.
出处
《微细加工技术》
2002年第2期58-67,共10页
Microfabrication Technology
基金
教育部博士点基金资助项目 (980 2 4 838)
