摘要
研制成功了一种实用的低功函数肖特基发射阴极—锆 /钨 (ZrO/W )阴极。这种阴极是在改进的电解腐蚀法制成的W单晶尖端表面 ,采用特别的涂覆法或蒸镀法 ,形成含ZrO膜层 ,并经特殊处理后得到的。实验测出了这种阴极在适当条件下的功函数值为 2 .86电子伏特左右 ,低于钨阴极的功函数值。
A low work function Schottky emission cathode, ZrO/W cathode,has been prepared.The cathode may be obtained in the case that ZrO thin film,which produced by the special method such as coating or depositing, is formed on the surface of tungsten single crystal tip etched by the improved electrochemical method. The experiment results show that the cathode work function, which is lower than tungsten cathode's, is about 2.86 eV in a available condition.
出处
《微细加工技术》
2002年第2期11-14,23,共5页
Microfabrication Technology
基金
国家自然科学基金资助项目 (10 16 4 0 0 4 )
