摘要
本文提供了一种用计算全息和零位光学系统组合补偿检测非球面的方法,实验证明该方法检测非球面面形偏差时,精度达λ/10。
A comb(?)naton method of computer-generated hologram (CGH) and null optical system for testing the aspheric surface is described. The experimental results proved that the accuracy of λ/10 can be obtained when an aspherrc surface istested by using the method.
出处
《应用光学》
CAS
CSCD
1991年第6期50-53,共4页
Journal of Applied Optics