摘要
提出一种新的随动坐标系矢量转换方法,给出用于转换散射电子空间输运坐标的矩阵方程。 该方程具有递推的形式,计算方便,并且只涉及乘法运算,不会引起计算上的困难,将其用于PMMA-Si中电子散射过程的Monte Carlo模拟,结果表明可以有效节约机时,提高模拟效率,明显优于习惯上使用的静态坐标系方程。
A new vector transformation method for follow-up coordinate system is proposed and a matrix equation for transforming spatial transporting coordinate of scattering electrons is given. The equation has recursion form and is convenient to calculate. It only relates to multiplication and will not lead to be difficult in calculation. The equation is applied to Monte Carlo simulation in the electro scattering process of PMMA-Si. The results show it can effectively save CPU time and improve simulation efficiency. The equation is obviously better than the static coordinate system equation.
出处
《光电工程》
CAS
CSCD
北大核心
2002年第3期24-27,共4页
Opto-Electronic Engineering
基金
国家九五科技攻关项目(KT0305-G9720 97-762-03-02)
国家重点基础研究项目(973计划)(G2000036504)
关键词
电子束曝光
蒙特卡罗法
坐标转换
Electron-beam exposure
Monte Carlo method
Coordinate transformation
