摘要
介绍了评价热载流子注入效应的加速寿命试验，针对具体的工艺线，提取了ＭＯＳ管加速寿命试验的模型参数，以阈值电压变化１０ ｍＶ为失效判据，分别对０．８ μｍ和０．６ μｍ工艺线的热载流子注入效应进行了评价。整个测试过程由程序控制，设备精度高，使用简便，适用于亚微米和深亚微米工艺线的可靠性评价。
This paper introduces the Accelerated Lifetime Experiment assessing hot carrier injection effect, abstracted MOS device model parameters of Accelerated Lifetime Experiment in specific process. According to the failure criterion of threshold voltage shift 10mV, evaluating hot carrier injection effect of 0. 8 μm and 0. 6μm process separately, the whole test is controlled by programme. The test instrument has high precision, and convenient in use. It is suitable for the reliability assessment of sub - micrometer and deep sub - micrometer processes.
出处
《电子产品可靠性与环境试验》
2002年第1期14-17,共4页
Electronic Product Reliability and Environmental Testing
