摘要声表面波器件的制造关键在于如何制作叉指换能器 ,特别对于 GHz频率以上的器件 ,亚微米线宽如何控制是声表器件能否制作成功的关键。This paper provides some methods of how to make the IDT of the SAW device,especially for submicrometer linewidth.
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