摘要
以甲烷为碳源气体 ,用直流等离子射流法制备了金刚石膜 .研究了不同甲烷浓度对金刚石膜的表面形貌和热导率的影响 .结果表明 ,在甲烷浓度φ(CH4)为 1.5 %时 ,可以获得较高热导率的金刚石膜 .
Thick diamond films were deposited by DC plasma jet using methane as carbon source. Effect of methane concentration on morphologies and thermal conductivity of the deposited thick diamond films were studied. The results shows that thick diamond films deposited with 1\^5% (volume fraction in hydrgen) methane have higher thermal conductivity.
出处
《广东有色金属学报》
CAS
2002年第1期17-20,共4页
Journal of Guangdong Non-Ferrous Metals
基金
广州市基础性研究项目 (98- J- 0 14 - 0 1)
关键词
甲烷
金刚石膜
表面形貌
热导率
浓度
methane
diamond films
morphology
thermal conductivity
